The linear motor used in these stages serves as an electromagnetic direct-driver. Such motors eliminate mechanical parts in the power transmission system and transmit the driving force to the motion stage without friction. The driver provides high-speed and high-acceleration operations. Coreless motors fit the positioning with high precision requirements well, because they will never have an adverse action with permanent magnets. In this way, the motor can maintain a smooth operation even at an ultra-low speed, and no vibration will be generated even if it operates at a high speed. As a result, the nonlinear behaviors can be avoided and it is easy to implement control at every position. Non-contact and ultra-precision optical encoders are equipped to directly measure the positions of stages. Cross-roller guides are configured, in which contact points of balls are replaced with the line contact of quenching rollers. With significantly enhanced rigidity and lower preloading, it reduces friction and realizes smoother operation of stages. Cross-roller guides are also featured with high guide accuracy and large load capacity. These linear motion stages are applicable for multiple applications with requirements for high precision.

     Very suitable for high-precision fields such as the pharmaceutical industry, laser cutting and scanning, biotechnology, metrology, AOI (Automatic Optical Inspection), laser marking, etc.